A method for the production of crucible-drawn siliciumstaeben with content in easily flue chtigen dopants, in particular antimony, within narrow resistance tolerances

摘要

A process for making crucible-drawn silicon rods containing volatile doping agents, especially antimony, said rods having narrow resistance tolerances, which comprises drawing from a pre-doped silicon melt a monocrystalline rod while passing through the melt a current of inert gas either intermittently or continuously.