Thin-film circuit with low temp. coefficient - has temp. coefficient of its capacitive elements reduced by tempering before applying capacitor second plates

摘要

The thin-film circuit is used. It consists of temperature compensated RC elements made of an AlTa alloy with 3-17% tantalum and deposited on an insulating substrate, as in 2546675. To reduce the temperature coefficient of the capacitive elements the AlTa alloy layer that has already been oxidised in the regions where the capacitors are wanted is tempered before the second capacitor plates are formed. Tempering lasts for 0.5 hours at 400 deg.C.