Vacuum vapour deposition of metals or metalloids - by thermal decomposition of their coordination cpds. with (2,2')-bipyridyl

摘要

A deposit of at least one metal or metalloid (M) is made on a substrate. A coordination cpd. of 2,2'bipyridyl (DPY) and the metal (M) with zero oxidn.; is used the cpd. M(DPY)n is heated for decomspn of M+ n(DPY), so the metal (M) is deposited on the substrate. The substrate is pref. heated in vacuo for decompsn. of the cpd. in the vapour phase, and the DPY is recovered, after a time based on the thickness of coating required. A coating of Si can be obtd. from Si(DPY)3, which decomposes above 370 degrees C. The process can also be employed to obtain coatings of e.g. Zr, Nb, V, Cr, Mo, W, Fe, Co, Zn, La, Ce, Y, U. Nitrides, carbides, silicides and oxides can also be deposited. Only a relatively low temp. is required for decompsn. of the coordination cpd. The cpds. can be prepd. by reducing the chloride of metal (M) dissolved in tetrahydrofuran with Li2DPY. The cpds. obtd. decompose belwo 500 degrees C. The substrate can be glass, steel, metals, SiO2, Al2O3, plastics.