Radiation raster electron microscope - provides visible deflection image using stationary detector scanned by deflection system in polarised raster (NL 29.3.78)

摘要

The radiation raster electron microscope uses a process for preventing a deflection image by scanning a stationary detector is a raster pattern by the microscope deflection system. The latter is energized in such manner that the raster pattern is produced is polarised coordinater at a specified angular velocity. The velocity is related to the radius of the scanned path. The scanning is carried out at identical radium differences. After each cycle the radium is pref. changed by a fixed value. The radium change may meet a specified term. The scanning may start at a min. radius, such that the zero reflex of the deflection image is not detected.