首页> 外国专利> Superconducting niobium-tin thin film prodn. for HF applications - by reactive vapour deposition at controlled growth rate, ensures good surface quality

Superconducting niobium-tin thin film prodn. for HF applications - by reactive vapour deposition at controlled growth rate, ensures good surface quality

机译:超导铌锡薄膜产品适用于HF应用-通过在受控的生长速率下进行反应性气相沉积,确保良好的表面质量

摘要

Prodn. of a superconducting Nb3Sn film on a Nb surface for h.f. applications involves heating the Nb surface with a Sn source in an evacuated reactor, so that the Sn diffuses into the Nb surface, a film with a thickness of 0.1-0.4 mu, being produced by adjusting the Sn vapour pressure to give a growth rate of min. 0.05 mu m/h and pref. max 0.3 mu m/h. The prodn. of a very thin Nb3Sn film ensures that the good surface qualities of the Nb substrate are transferred to the film and subsequent surface treatment is made superfluous. Superconductors of this type are useful at frequencies of ca. 10 MHz and more, esp. as resonators and separators for particle accelerators or h.f. resonators for other purposes, e.g. frequency standards or esp. hollow cavity resonators or resonator coils.
机译:产品Nb表面超导Nb3Sn膜的h.f.应用包括在真空反应器中用锡源加热Nb表面,使Sn扩散到Nb表面,通过调节Sn蒸气压以使生长速度为0.1-0.4μm,形成厚度为0.1-0.4μm的膜。分钟0.05微米/小时最大0.3微米/小时产品非常薄的Nb3Sn薄膜的表面涂层确保将Nb衬底的良好表面质量转移到薄膜上,并且使后续的表面处理变得多余。这种类型的超导体可用于频率为ca的情况。 10 MHz以上,尤其是作为粒子加速器的谐振器和分离器或h.f.其他用途的谐振器频率标准或特别是空心谐振腔或谐振线圈。

著录项

  • 公开/公告号DE2754748A1

    专利类型

  • 公开/公告日1979-06-13

    原文格式PDF

  • 申请/专利权人 SIEMENS AG;

    申请/专利号DE19772754748

  • 申请日1977-12-08

  • 分类号C23C13/02;H01B12/00;H01P11/00;

  • 国家 DE

  • 入库时间 2022-08-22 19:47:43

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