Method and device for the production of a pump, a vacuum evaporation of the type a titanium

摘要

1522048 Gettering LEYBOLD-HERAEUSVERWALTUNG GmbH 14 Sept 1976 [29 Oct 1975] 38088/76 Heading H1D To improve performance of a sublemable getter pump, e.g. using Ti or Ta, in or attached to a vacuum system, vaporization takes place intermittently, the vaporization times being separated by non-vaporizing intervals of duration t, the vaporization duty increasing with increasing gas pressure p in the system. Preferably the non-vaporizing intervals are regulated according to where index n may be 1 and then c= 10SP-4/SP-10SP-7/SP mb.s. If a pressure gauge and timing control are provided, the control may be adjusted according to pressure to maintain the above relationship either manually or automatically. The control may carry switches to select n and c.