Vacuum coating appts. for prodn. of metal carbide or nitride films - where a reaction gas is passed through a hollow cathode gun for heating vapour source

摘要

Vacuum coating appts. for producing a coated film of metal carbide or nitride on a base plate, comprises a sealed chamber, maintained under high vacuum, a vapour source boat disposed spaced beneath a base plate in the chamber, and an electron beam gun of known hollow cathode type for heating the vapour source. The reaction gas, e.g., hydrocarbon, N2, etc., is introduced through the hollow cathode gun into the vacuum chamber so as to react with the metal vapour generated from the boat before it reaches the substrate. As the reaction gas passes through the gun, it also serves as a cathode protecting gas.