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Induction heating coil for float zone melting of semiconductor rods
Induction heating coil for float zone melting of semiconductor rods
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机译:感应加热线圈,用于半导体棒的浮区熔化
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摘要
An induction heating coil for the float zone melting of semiconductor materials. The distribution of current on the surfaces of the coil is modified by altering the surfaces of the coil. The alteration of the surfaces is in the form of selectively positioned saw slots and solid conductor strips. The current distribution can be controlled independently on the top and bottom surfaces of the coil.
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