MEASURED VALUE COMPENSATING METHOD IN TEMPERATURE MEASURING METHOD BY INFRARED RAY

摘要

PURPOSE:To measure the temperature of a low-temperature region accurately independently of the directivity of the emissivity of infrared rays, by radiating short wavelength infrared rays to the object surface to be measured in the same direction as reference infrared rays and by measuring their reflectance. CONSTITUTION:Short-wavelength infrared rays are irradiated from the same direction as irradiation of reference infrared rays NB, and the infrared reflectance of sample surface 7 is measured and compensated. For example, sample surface 7 is irradiated intermittently with black-body furnace 1 with chopper 2 for generating reference infrared rays, and reflection infrared-ray components N2 and infrared-ray components N1 radiated from the sample itself are detected by detector 4 to find emissivity epsilon of the surface, and further, surface temperature T1 is obtained. In this case, the black-body furnace, the detector, and accessory apparatus concerning short-wavelength infrared rays are provided independently, or those for reference infrared rays are used in common.