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Non-crucible zone melting furnace - with protective cylinder reheating recrystallised part of rod by reflected heat
Non-crucible zone melting furnace - with protective cylinder reheating recrystallised part of rod by reflected heat
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机译:非坩埚区熔化炉-带有保护筒,通过反射热将棒重新结晶的部分加热
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摘要
In a non-crucible zone melting process a vertical silicon rod is guided in the top wall of an evacuated or inert gas-filled receptacle. The lower part of the rod which has been recrystallised by the molten zone is surrounded by a cylindrical protective case which reheats it by reflected heat radiation. This case has dia. 15-100 cm and is made at least on its inside of aluminium or silver. Prior problems of generation of considerable thermal stresses in the recrystallised part of a silicon rod, esp. at dias. of 10 cm and more, are overcome.
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