OBSERVATION OF MAGNETIC DOMAINS WITH SCANNING ELECTRON MICORSCOPE

摘要

PURPOSE:To enable the structure of magnetic domains, which are magentized perpendicular to the surface of a sample, to be clearly observed with a high multiplying factor by slanting the sample from an axis perpendicular to the axis of electron rays, slanting the sample from the axis perpendicular to both of the said axes, and installing a detector detecting scattered electrons within the space opposed to the surface of the sample. CONSTITUTION:A sample 1 is slanted from an axis X, which is perpendicular to an electron-ray axis Z, by an angle of alpha. Due to the above slant of the sample 1, a magnetization Ms of each magnetic domain develops a magnetic component of Ms sinalpha in X direction. In addition, the sample 1 is slanted from a Y-axis, which is perpendicular to both the X and the Z axes, by an angle of theta. By thus setting the sample 1, the magnetic Ms sinalpha component corresponds to the direction of the magnetization, and electron rays are easily or hardly discharged from the surface of the sample 1 according to the area of the sample 1. After that, reflected electrons scattered from the sample 1 are detected with a detector 2, and are introduced into a cathode-ray tube. The detector 2 is installed opposed to the sample 1, at an appropriate position within a space surrounded by the X, Y and Z axes.