Selective duennschicht - gas sensor with great sensitivity and stability for the detection and measurement of gaseous hydrocarbon - impurities in the air on the basis of tungsten oxide (wo (arrow down) x (arrow down)) - semiconductors, and a process for its production

摘要

1. A selective thin-layer gas sensor of high sensitivity and stability for detecting and measuring gaseous hydrocarbon impurities in the air on having a basis of tungsten oxide semiconductors on substrates made of quartz glass, oxidized silicon, or ceramic, wherein the electrical resistance of the tungsten oxide layer depends on the type and concentration of the gas to be detected, characterised in that the tungsten oxide semiconductor consists of a sputtered WO3-delta -thin layer, where 0 delta 0.2.