DETECTING CIRCUIT IN WHICH PRESSURE FOR ION MASS FLOW-RATE SENSOR IS COMPENSATED AND METHOD OF PRESSURE-COMPENSATING OUTPUT OF ION MASS FLOW-RATE SENSOR

摘要

An improved detection circuit for an ion mass air flow sensor having a feedback circuit from the differential output of the sensor to the regulatory input of the high voltage supply. The feedback signal provides a second order correction to the output voltage of the high voltage power supply. This second order correction of high voltage power supply output voltage compensates the differential output of the sensor as a function of the airflow's pressure.