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OBSERVATION METHOD OF MAGNETIC SECTOR CONSTRUCTION USING ELECTRON MICROSCOPE

机译:利用电子显微镜观察磁行业的方法

摘要

PURPOSE:To observe a magnetic sector construction wit no effect from magnetic fields by placing a sample at a slant in an objective lens of an electron microscope so that a scanned image can be obtained by means of reflected electrons from the sample and by turning the objective lens off. CONSTITUTION:When observing a magnetic sample, if it is desired to apply no magnetic field to a sample first, an objective lens is turned off and an electron beam is converged by a focusing lens so as to focus a spot on the sample 4, then the electron beam is scanned by deflection coils 5a, 5b on the sample in two dimensions. Electrons reflected by this scan from the sample surface are detected by a detector 11, then the signals are fed to a CRT 8 and a magnetic sector construction of the sample is displayed as a cscanned image. If it is desired to observe the effect from magnetic fields on the sample, the objective lens is energized on and the magnetic field with a desired strength can be applied. By radiating the electron beam, not only reflected electrons but also transmission electrons are generated. Therefore, if a diffracted pattern is focused on a phosphor screen by using an intermediate lens 13 and a projecting lens 14, the direction of the sample can be determined conveniently.
机译:目的:通过将样品倾斜放置在电子显微镜的物镜中来观察磁场的影响而不受磁场的影响,以便可以通过反射样品中的电子并旋转物镜来获得扫描图像镜头关闭。组成:观察磁性样品时,如果需要先不对样品施加磁场,则关闭物镜,并通过聚焦透镜会聚电子束,以便将斑点聚焦在样品4上,然后电子束被样品上的偏转线圈5a,5b二维扫描。通过该扫描从样品表面反射的电子由检测器11检测,然后将信号馈送到CRT 8,并且将样品的磁扇区构造显示为扫描图像。如果希望观察磁场对样品的影响,则可对物镜通电并施加具有所需强度的磁场。通过辐射电子束,不仅产生反射电子,而且产生透射电子。因此,如果通过使用中间透镜13和投射透镜14将衍射图案聚焦在荧光屏上,则可以方便地确定样品的方向。

著录项

  • 公开/公告号JPS57187852A

    专利类型

  • 公开/公告日1982-11-18

    原文格式PDF

  • 申请/专利权人 NIPPON DENSHI KK;

    申请/专利号JP19810071236

  • 发明设计人 ETOU TERUKAZU;

    申请日1981-05-12

  • 分类号H01J37/20;H01J37/26;H01J37/29;

  • 国家 JP

  • 入库时间 2022-08-22 11:57:15

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