DIFFERENTIAL CAPACITY TYPE PRESSURE AND DIFFERENTIAL PRESSURE GAUGE

摘要

PURPOSE:To detect even high measured pressure by supporting a moving and a movable electrode like a cantilever beam, and using a measuring bellows as a pressure receiving element for measurement. CONSTITUTION:In a sensing chamber 2 formed in a main body, a moving electrode 10 and fixed electrodes 11 and 12 are supported on the main body 1 like a cantilever beam. In the sensing chamber 2, through holes 20 and 21 are made; a bellows 22 for measurement which is fixed to the moving electrode 10 at one end and to the main body 1 at the other end is provided in one through hole 20. Further, a pressure receiving element 24 is provided in the other through hole 21 while covering the through hole. Thus, even when high pressure is measured, no irregular deformation occurs at the moving electrode 10 and even high pressure is detected.