首页> 外国专利> METHOD OF PLASMA DEPOSITING A GLASS, A GLASS OR SILICA OPTICAL FIBRE PREFORM PRODUCED BY THIS METHOD, AND METHOD OF MAKING A SILICA OPTICAL FIBRE FROM THIS PREFORM

METHOD OF PLASMA DEPOSITING A GLASS, A GLASS OR SILICA OPTICAL FIBRE PREFORM PRODUCED BY THIS METHOD, AND METHOD OF MAKING A SILICA OPTICAL FIBRE FROM THIS PREFORM

机译:等离子体沉积玻璃的方法,通过该方法生产的玻璃或二氧化硅光纤预制棒以及从该预制棒制造二氧化硅光纤的方法

摘要

A vitreous material, for example silica, is deposited on the inner surface of a tube (11) from the decomposition of a volatile silicon compound in a hot intense inductive plasma material by the application of radio frequency power from a generator (17) via a coupling coil (15) and a matching coil (16). The use of such an inductive plasma feed with gas at a pressure within the range of 0,1 to 50 Torr, provides fusion of the deposited silica on the inner surface of the tube, the outer surface of the tube (11) being water cooled. The process may be employed in the production of preform tubes for step or graded index optical fibre manufacture.
机译:玻璃质材料,例如二氧化硅,是通过热产生的感应等离子体材料中的挥发性硅化合物的分解,通过从发生器(17)经由射频施加的射频功率而沉积在管(11)的内表面上的。耦合线圈(15)和匹配线圈(16)。这种感应等离子体进料与压力在0.1至50托之间的气体一起使用,可使沉积的二氧化硅在管子的内表面熔化,管子(11)的外表面被水冷。该方法可用于生产用于阶跃或渐变折射率光纤的预制棒管。

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