AUTOMATIC COMPENSATING METHOD FOR TEMPERATURE DEPENDENCY OF JUNCTION CAPACITANCE OF SAMPLE IN DLTS MEASUREMENT AND BIAS CIRCUIT

摘要

PURPOSE:To compensate the temperature dependency of deep level-transient spectroscopy (DLTS) easily and automatically by using an arbitrary diode in a Schottky diode array of one wafer prepared as the sample to be measured as an element for compensation connected to the differential terminal of a capacitance bridge with the differential terminal and connecting the diode to the differential terminal through the bias circuit. CONSTITUTION:One diode in the Schottky diode array of one wafer prepared as the sample to be measured is used as the element D2 for compensation. Accordingly, since the temperature dependency of the junction capacitance C0' of the element D2 for compensation approximates to that of the junction capacitance C0 of the sample to be measured D1, the capacitance C0 of the sample D1 can be cancelled easily only by applying the same reverse bias as the sample D1 to the element D2, and automatic measurement by a computer is enabled.