METHOD FOR PROVIDING HIGH ELECTRIC CONDUCTIVITY TO SURFACE LAYER OF DIAMOND BY ION IMPLANTATION

摘要

PURPOSE:To provide high electric conductivity to the surface of diamond by implanting ions into the surface of the diamond after heating the surface to a specified temp. or above. CONSTITUTION:Ions of an element such as N, Ar, Ti or Zr are implanted into the surface of diamond by ion irradiation to make the surface amorphous and to improve the electric conductivity. At this time, the surface of the diamond to be subjected to ion implantation is heated to =50 deg.C by external heating such as resistance heating or with ion beams for ion irradiation. Since high electric conductivity is provided to the surface layer of the diamond by the ion implantation, the diamond shows superior quality when used as a material for a light transmitting electrode, a stylus for a videodisk or a record player.