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JOSEPHSON TUNNEL JUNCTION DEVICE OF NIOB-INSULTOR-NIOB AND METHOD OF PRODUCING SAME
JOSEPHSON TUNNEL JUNCTION DEVICE OF NIOB-INSULTOR-NIOB AND METHOD OF PRODUCING SAME
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机译:NIOH-绝缘子-NIOH的JOSEPHSON隧道结装置及其制造方法
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摘要
A method of forming a superconductor-barrier-superconductor junction device by the steps of depositing a first superconductive layer on a substrate, forming a barrier layer on the first superconductive layer and depositing a second superconductive layer on the barrier layer. A layer of photoresist is then deposited over the second superconductive layer and patterned together with the second superconductive layer to form a mesa structure. A dielectric layer is deposited over the mesa structure, and the photoresist layer portion is dissolved thereby lifting off the dielectric portion overlying said second superconductive layer portion.
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