The degree of vacuum in the vacuum monitoring device electrical equipment

摘要

The electric field detecting member includes a Pockel's cell made by appropriate cutting of a quartz crystal in that direction which avoids the piezo-electric phenomena. The light from the laser light source is applied to the electric field detecting member by directing the laser beam onto the Pockel's cell and the analyser. An electric signal field is applied to the Pockel's cell from the electric signal generating member. The Pockel's cell that causes the phase angle of polarization to change and the analyzer is provided so that the plane of polarization is rectangular with respect to the optical axis.