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Where alignment marks sheet provided with a half-shell shaped element as well as aligning device for the same
Where alignment marks sheet provided with a half-shell shaped element as well as aligning device for the same
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机译:具有半壳形元件的对准标记片以及用于该对准标记片的对准装置
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摘要
A sheet-like member, such as a reticle, mask or wafer, has alignment marks, which are staggered about a pattern area thereof. The arrangement of the alignment marks is effective to enhance the degree of alignment and also to avoid undesirable overlapping of the reticle mark and the wafer mark.
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