A broadband attenuator section in a meander line slow wave structure is disclosed for attenuating signals reflected between the output and input of the slow wave structure. The attenuator section comprises a multi-element ceramic support structure intermediate the meander line conductor pattern and the substrate wherein the support elements are comprised of a beryllium oxide-silicon carbide ceramic composition with a taper in the percentage of silicon carbide being provided in the transition region from a loss free section of the slow wave structure to a lossy attenuator section. The taper in percentage involves the use of ceramic support elements arranged in a sequence of 1%, 2% and 5% silicon carbide composition prior to the main attenuator section which is comprised of 10% silicon carbide - 90% beryllium oxide support elements.
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