TE-COMPONENT DETECTING APPARATUS WHEN SETE PHOTOSENSITIVE BODY IS EVAPORATED

摘要

PURPOSE:To reduce the price of an apparatus, by attaching a transparent conductive film, a heater and a lamp to a transparent sensor, which is arranged so that it is slidden freely, and connecting a Te component detector in an evaporated film, which is attached to a slit formed in the conductive film, which the conductive film. CONSTITUTION:A transparent conductive film 16 such as SnO2 is formed on one surface of a square substrate 15. A slit 17 is provided at the center so as to divide the film into two parts. Connecting terminals 18 and 19 are provided. A thin film resistor heater 20 having connecting terminals 21 and 22 is provided on the other surface. Thus, a transparent quarz glass sensor 8 is constituted. In a vacuum evaporation container 1, a heating source 2, a shutter 3 and a mandrel 5 for heating photosensitive substrate 4 are arranged. SeTe vapor is evaporated from the heating source 2 at a main evaporating angle theta. In an insulating box 7, which is fixed to a frame 6, a sensor 8, an electrode extracting insulating plate 9 and a pushing plate 10 are arranged as a unitary body. The pushing plate 10 is pushed and moved in the horizontal direction by a pushing rod 13, which is linked to a feeding screw 12 that is driven by a motor 11.