AMORPHOUS FINE-PART POWDER AND METHOD FOR PRODUCING A FINE-PART POWDER MIXTURE FROM SILICON NITRIDE AND SILICIUM CARBIDE

摘要

Fine spherical amorphous powder represented by the general formula: SiCxNyHz wherein 0.1x2.0, 0.1y1.5 and 0z4, is prepared by vapor phase oxidation of organosilicon compound substantially free from halogen atoms and oxygen atoms. An ultimately crystalline, uniform and fine powder of silicon nitride and silicon carbide is prepared by heat treatment of the fine spherical amorphous powder. The powder and the crystalline uniform, and fine powder are used as raw materials for composite ceramics and as functional materials for solar cell.