Grinding amorphous silicon nitride powder prior to heating to produce crystalline silicon nitride powder

摘要

Crystalline silicon nitride powder in the form of granular particles having a large tap density and having good filling characteristics is produced by heating amorphous silicon nitride powder under an inert or reducing gas atmosphere. The amorphous silicon nitride powder is ground prior to the heating and the powder to be heated is maintained at a temperature of 1250° C. to 1430° C. for at least one hour in the course of temperature rise.