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INSTRUMENT FOR MEASURING THICKNESS DISTRIBUTION OF LIQUID FILM
INSTRUMENT FOR MEASURING THICKNESS DISTRIBUTION OF LIQUID FILM
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机译:液膜厚度分布测定仪
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摘要
PURPOSE:To measure the thickness distribution of liquid highly accurately and simply by providing the titled device with a moving mechanism for moving a line image sensor having plural photodetecting elements and a projector simultaneously and two-dimensionally in parallel with the liquid film and an operating means. CONSTITUTION:Light irradiated from the projector 3 is absorbed into a colored liquid film 1 and converted into an electrical signal by an image sensor 2. A control/operation part (CPU)9 measures the position of the projector 3 from a signal outputted from a rotary encoder 7, and when the sensor 2 and the projector 3 reach a previously specified measuring position, stores the signal of the sensor 2 in a memory together with the positional data. When both the sensor 2 and projector 3 are moved from the left side of the liquid film 1 to its right side for instance, the CPU9 outputs the previously specified horizontal measuring position and the data and graph of the liquid film thickness converted from a signal of the sensor 2 at the measuring position to an X-Y protter 10, rotates feeding screw shafts 11, 12 and changes the vertical directions of the sensor 3 and the projector 3. Repeat of said operation makes it possible to measure the thickness of the liquid film.
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