PURPOSE:To enable the evaluation of 3-D dispersion and changes in the density of material, by varying the irradiation point of an electron beam quadratically in a fine range to perform an arithmetic processing of the detection values in the intensity of reflected electrons and energy dispersion of characteristic X rays. CONSTITUTION:Electron beams emitted from an electron beam 1 are focused on a measuring sample on a sample base 6 through a condenser lens 3 and an objective lens 4 and the sample base 6 is moved with a sample base driver 13 to vary the irradiation point of the electron beam quadratically in a fine range sequentially. The intensity of the reflected electrons are memorized into an auxiliary memory 15 through a reflected electron analyzer 7 and an arithmetic unit 12. On the other hand, energy dispersion and wavelength dispersion of characteristic X rays are memorized into the memory 15 respectively through an energy analyzer 29 and the arithmetic unit 11 and a wavelength analyzer 10 and an arithmetic unit 12. The arithmetic unit 14 determines the composition and concentration of elements from these memory data. Thus, secondary electrons, reflected electrons and characteristic X rays generate in this order from the shallower location thereby enabling the evaluation of 3-D dispersion and changes in the concentration.
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