DEVIATION MEASURING INSTRUMENT AND MEASURING INSTRUMENT FOR DEVIATION AND DISTANCE

摘要

PURPOSE:To simplify the structure of the instrument and to reduce its size by fixing the 1st and the 2nd photodetection plates to an object of measurement in parallel at specific distance from each other, and measuring the position shift and angle deviation of the object of measurement on the basis of detection signals of said photodetection plates. CONSTITUTION:The 1st and the 2nd photodetection plates 10 and 11 output detection signals corresponding to irradiation positions of a light beam 3 respectively, the those detection signals are inputted to a computing element 14 through temperature compensating circuits 12a and 12b and amplifiers 13a and 13b respectively. This computing element 14 measures the position shift and angle deviation of the object 14 of measurement on the basis of said detection signals and they are displayed on respective indication parts 15-18. Consequently, the structure is simplified and reduced in size and troubles are reduced because there is no movable part.