AUTOMATIC MEASURING SYSTEM OF SECTIONAL SHAPE

摘要

PURPOSE:To measure a sectional shape at a high speed, and also without being influenced by a local variation, from an image of a scanning electron microscope having many deteriorated noises, by detecting and edge of a step with a high accuracy based on information of a wide area. CONSTITUTION:A stereo-measurement is executed by a scanning electron microscope 14, a sample base 11 and a detector 10, etc. In this case, as for an electron emitted from an electron gun 6, its focus is stopped down by an electron lens system of a condenser lens 7, an objective lens 9, etc., and it is made incident on the surface of a sample 12. With respect to an incidence of this electron beam, a secondary electron is emitted from the sample, therefore, an image is constituted by detecting this electron signal and using it. Subsequently, from an extracted edge of the upper end and the lower end, a line for showing an average shape is drawn by using the minimum square method. A distance between the upper end edge and the lower end edge, an angle made by the edge line and the picture vertical direction, and an angle made by the electron beam and the sample base normal direction, by these lines are derived with regard to two pictures, and a height and a width of the step are derived. In this way, a sectional shape of the sample can be measured.