首页> 外国专利> RECORD SUPPORTING BODY WITH MULTICOLOR MICROSCOPIC STRUCTURE, PARTICULARLY MICROSCOPIC MAPPING TYPE AND MANUFACTURE THEREOF

RECORD SUPPORTING BODY WITH MULTICOLOR MICROSCOPIC STRUCTURE, PARTICULARLY MICROSCOPIC MAPPING TYPE AND MANUFACTURE THEREOF

机译:具有多色微观结构,特别是微观映射类型的记录支持体及其制造

摘要

A recording medium with a multicolor high resolution pattern created by layer packs. Pattern-forming layers of the layer packs are successively applied by photolithographic means in a sequence corresponding to a color of the high resolution pattern. The pattern-forming layers of the layer packs are separate from one another on the substrate of the recording medium. The process for producing the recording medium includes applying a photoresist layer to a substrate and developing the photoresist. Pattern-forming layers are successively applied over the whole surface of the substrate in a sequence corresponding to a color. The remaining photoresist and the layers overlying it are removed to leave a sequence of pattern-forming layers on the substrate separate from any adjacent pattern-forming layers.
机译:由图层包创建的具有多色高分辨率图案的记录介质。叠层的图案形成层通过光刻装置以与高分辨率图案的颜色相对应的顺序依次施加。层组的图案形成层在记录介质的基板上彼此分离。产生记录介质的方法包括将光致抗蚀剂层施加到基板上并显影光致抗蚀剂。图案形成层以与颜色相对应的顺序依次施加在基板的整个表面上。去除剩余的光致抗蚀剂和其上的层,以在基板上留下与任何相邻的图案形成层分开的一系列图案形成层。

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