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METHOD FOR DIFFUSING ZN INTO COMPOUND SEMICONDUCTOR OF INP SYSTEM
METHOD FOR DIFFUSING ZN INTO COMPOUND SEMICONDUCTOR OF INP SYSTEM
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机译:将ZN扩散到INP系统的复合半导体中的方法
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摘要
PURPOSE:To enable very stable and excellently reproducible diffusion having as a source Zn3P2 which is a product from thermal decomposition of ZnP2, by locally heating the ZnP2 portion after vacuum sealing to cause it to decompose, allowing it to condensate on the inner wall of a quartz tube, and then diffusing it. CONSTITUTION:Weighted ZnP2 5 is placed in a quartz tube 1 at one end thereof, and a InP wafer 3 is placed in the center of the tube 1. After vacuum sealing in a vacuum below 1X10-6 torr, only the ZnP2 5 portion is heated with a burner 7 to decompose and allowed to condensate on a cooling portion 6. Thereafter, it is placed in a heat treatment furnace of 500 deg.C for, e.g., 20 minutes, thereby forming P-type layer which is about 2mum deep. At this time, if the amount of ZnP2 to be enclosed exceeds 0.2mg/cm3, the decomposition product of ZnP2 does not become Zn3P2, and the diffusion depth becomes shallow. Further, if the amount is less than 0.005mg/cm3, the saturated vapor pressure at 500 deg.C is not reached, thus providing inferior reproductivity of diffusion depth. Accordingly, if the amount of ZnP2 is set within the range of 0.005mg/cm3-0.2mg/cm3, ZnP2 decomposes into Zn3P2 and P4 and becomes easy to vaporize, exhibiting very good reproductivity.
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机译:目的:通过在真空密封后局部加热ZnP2部分使其分解,使其在冷凝器的内壁上凝结,从而使ZnP2部分热分解而产生非常稳定且可重复的扩散,其源为ZnP2的热分解产物。石英管,然后将其扩散。组成:称重的ZnP2 5的一端放在石英管1中,InP晶片3放在管1的中心。在低于1X10 -6托的真空中真空密封后,只有ZnP2 5用燃烧器7加热该部分,以使其分解并在冷却部分6上冷凝。此后,将其放置在500℃的热处理炉中例如20分钟,从而形成约200μm的P型层。 2毫米深。此时,如果要封入的ZnP 2的量超过0.2mg / cm 3,则ZnP 2的分解产物不会变成Zn 3 P 2,并且扩散深度变浅。此外,如果该量小于0.005mg / cm 3,则不能达到500℃的饱和蒸气压,因此扩散深度的再现性差。因此,如果将ZnP 2的量设定在0.005mg / cm 3 -0.2mg / cm 3的范围内,则ZnP 2分解为Zn 3 P 2和P 4,并且容易汽化,显示出非常良好的繁殖性。
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