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AN IMPROVED ISOLATION VALVE FOR ISOLATING THE INTERIOR OF A CHAMBER
AN IMPROVED ISOLATION VALVE FOR ISOLATING THE INTERIOR OF A CHAMBER
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机译:一种用于隔离腔室内的改进型隔离阀
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摘要
A valve for isolating the interior of a glow discharge chamber from the atmosphere and other reactants. The valve includes a body mounted in an aperture of the chamber. A slit-like opening is provided therein to allow the interior of the chamber to communicate with interrelated elements of a deposition system. A source is provided for introducing inert gas into the opening under pressure somewhat greater than that of reaction gases and plasma within the chamber to create an effective, non-reactive gas curtain.
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