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SYSTEM FOR OBJECT ANGULAR DISPLACEMENT COMPENSATION OF DOUBLE-REFLECTING INTERFEROMETRIC DISPLACEMENT METERS
SYSTEM FOR OBJECT ANGULAR DISPLACEMENT COMPENSATION OF DOUBLE-REFLECTING INTERFEROMETRIC DISPLACEMENT METERS
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机译:双折射干涉仪位移量的对象角位移补偿系统
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摘要
the system of compensation for the angular variance of двухлучевых fringe size measures displacement, содержаща optical фокусирующую system располож енную in an objective beam интерферометра,отличающ
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