METHOD AND DEVICE FOR RECORDING SIGNAL VARIATIONS FROM A CYCLICALLY DRIVEN PROBE DEPENDENT ON SPORADICALLY OCCURRING EVENTS

摘要

1. A method for recording signal variations from a cyclically operated probe (PR), wherein secondary electrons (SE) which cause a secondary electron signal (SI) in a detector (DT), are triggered by a corpuscular sampling device (PE) on the probe (PR), wherein a probe control unit (BA) controls the probe (PR) and wherein the secondary electron signal (SI) is recorded, characterised in that the secondary electron signal (SI) is firstly intermediately stored and only recorded if a sporadic event has occurred on the probe (PR).