HIGH-VOLTAGE SUPPLY UNIT FOR SUPPLYING REGULABLE OUTPUT HIGH VOLTEGE, ADVANTEGOUSLY FOR OPERATING ION- OR ELECTRON RAY PROCESSING AND EVAPORATING APPARATUS OF LOW POWER

摘要

The invention relates to a stabilized high voltage source the output voltage of which may be regulated in wide range, whereby the adjusted output current is constant at variable load. The high voltage supply source comprises a high voltage rectifier fed by a push-pull driving circuit, a control circuit supplying push-pull width modulated control signals of the driving circuit and an error signal processing circuit working up the divided voltage and current signals taken from the output of the high voltage source. The output signal of the error signal processing circuit is applied to the control circuit as a control signal. The supply voltage of auxiliary circuits of the supply source is provided by a stabilized low voltage supply unit.