首页>
外国专利>
SPECTROMETER FOR DETECTING SECONDARY ELECTRONS PRODUCED BY AN ELECTRON PROBE FROM A TARGET
SPECTROMETER FOR DETECTING SECONDARY ELECTRONS PRODUCED BY AN ELECTRON PROBE FROM A TARGET
展开▼
机译:用于从目标中检测电子探针产生的二次电子的光谱仪
展开▼
页面导航
摘要
著录项
相似文献
摘要
An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.
展开▼