A device for temporarily insulate a subject of an enclosure at vacuum.

摘要

Device for temporarily isolating an object 7 from a vacuum enclosure 1. According to the invention, this device is composed of: - a sealed main chamber 9 with extensible side walls 10 one of the ends 12 of which is securely fastened to a support 8 intended to receive the object 7; - means 13 for obtaining the vacuum in the main chamber 9; - means 12 for putting the main chamber 9 in communication with the vacuum enclosure 1 or for insulating them from one another; - means 14 for compressing or drawing out the side walls 10 of the main chamber 9. The invention may be used in particular in the technique of epitaxy by molecular jets. IMAGE