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Method for the processing of measurement data in a gas friction vacuum meter and a gas friction vacuum meter equipped with a circuit for the practice of this method

机译:在气体摩擦真空计中的测量数据的处理方法以及配备有用于实施该方法的电路的气体摩擦真空计

摘要

A method for the processing of values measured in a gas friction vacuum meter, in which the pressure is determined by the drag on a magnetically suspended free ball, by forming a first time value t.sub.n- 1 by measuring the time required for N/2 periods of revolution of the ball, and a second time value t.sub.n by the immediately following measurement of the time required for another N/2 periods of revolution of the ball, determining a pressure value by comparing the two times values, repeating this pressure value determination of two time values after each period of rotation for the same number N of periods of revolution of the ball to a total of z determinations, and displaying the average of the pressure value determined Z times. To be able to determine the pressure with optimum measurement times and uncertainties of measurement, the ratio of N to Z is selected at approximately 4:1.
机译:一种用于处理在气体摩擦真空计中测量的值的方法,其中压力是通过测量磁性悬浮自由球上的阻力来确定的,方法是通过测量所需的时间来形成第一时间值tn-1球的N / 2个旋转周期和第二个时间值tn,通过紧接着测量球的另外N / 2个旋转周期所需的时间,通过比较这两个时间来确定压力值在每个旋转周期之后,对两个时间值重复进行此压力值确定,直到球的旋转次数相同N次,总共进行z次确定,并显示确定的Z次压力值的平均值。为了能够以最佳的测量时间和测量的不确定性确定压力,将N与Z的比率选择为大约4:1。

著录项

  • 公开/公告号US4640136A

    专利类型

  • 公开/公告日1987-02-03

    原文格式PDF

  • 申请/专利权人 LEYBOLD-HERAEUS GMBH;

    申请/专利号US19840680378

  • 发明设计人 LOTHAR SCHMIDT;

    申请日1984-12-11

  • 分类号G01L9/00;

  • 国家 US

  • 入库时间 2022-08-22 07:09:42

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