Method for purifying an industrial raw material gas and a purifier for use in said method and a method of manufacturing said purifier

摘要

The invention relates to a purifier for purifying an industrial raw material gas, formed by depositing a hydrogenated or a fluorinated amorphous substance of an element selected from a group consisting of Si and Ge on a carrier such as a zeolite. The industrial raw material gas to be purified is brought into contact with the purifier, which is maintained at a predetermined temperature, to remove simultaneously a small amount of oxygen and water components from the industrial raw material gas.