ARGON PURIFYING METHOD RECOVERING ARGON AND HYDROGEN IN PURIFIED ARGON TOWER WASTE GAS

• 1. 一种用于工业气体制造的精氩塔氩侧压力自动控制装置 [P] . 中国专利： CN215067895U . 2021-12-07
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• 3. Method for recovering and purifying argon gas from silicon single crystal manufacturing apparatus and apparatus for recovering and purifying argon gas [P] . 美国专利： US9890044B2 . 2018-02-13

  机译： 从硅单晶制造设备中回收和纯化氩气的方法以及用于回收和纯化氩气的设备

• 4. METHOD FOR RECOVERING AND PURIFYING ARGON GAS FROM SINGLE-CRYSTAL-SILICON PRODUCTION DEVICE AND DEVICE FOR RECOVERING AND PURIFYING ARGON GAS [P] . 韩国专利： KR20160114598A . 2016-10-05

  机译： 从单晶硅生产装置中回收和净化氩气的方法以及用于回收和净化氩气的设备

• 5. METHOD FOR RECOVERING AND PURIFYING ARGON GAS FROM SILICON SINGLE CRYSTAL MANUFACTURING APPARATUS AND APPARATUS FOR RECOVERING AND PURIFYING ARGON GAS [P] . 美国专利： US2016325996A1 . 2016-11-10

  机译： 从硅单晶制造装置中回收和净化氩气的方法以及用于回收和净化氩气的装置

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