BOAT MEMBER FOR LIQUID PHASE EPITAXY APPARATUS

摘要

PURPOSE:To prevent adsorption of moisture, etc., and elimination of graphite powder, by covering the surface of a boat member for liquid-phase epitaxy graphite apparatus with glassy carbon consisting of a thermal decomposition product of an organic polymer. CONSTITUTION:Powder of an organic polymer, e.g. vinyl chloride resin, polycarbonate resin, etc., is heat-treated in an inert atmosphere and thermally decomposed to produce a pitchlike substance, which is then dissolved in a solvent, applied to the surface of a graphite boat member for a liquid-phase epitaxy apparatus, heated and fired in an inert atmosphere and vitrified. Since the resultant boat member has a hard surface and open pores are completely filled up and covered with a dense and high-purity layer, there is no vaporization of impurities from the interior, elimination of graphite powder, etc., with the result the deterioration in characteristic of epitaxial growth films is not caused.