Apparatus and method for generating a nearly mono-energetic, high flux beam of high velocity atomic gas particles

摘要

Method and apparatus for generating a nearly mono-energetic beam of atoms at velocities on the order of several km/s (energies of 1-10eV) and for achieving modification of the surface properties of a target (40) by the beam. A gas is forced through a nozzle throat (16) into a previously evacuated expansion nozzle (28) resulting in the acceleration of the gas in a confined flow. Laser radiation is applied to the gas flow wto cause breakdown and dissociation of the gas into an atomic plasma. The plasma is allowed to expand within the nozzle cone (28) reaching a high velocity in the desired range. The beam is generated within a vacuum chamber (12).