Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media

摘要

A method for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures and/or similar media in two or more stages from at least one receiver by evacuation is to be developed further so that a final pressure of less than 10-2 hPa, and preferably in the range 10-3 hPa to 10-4 hPa, can easily be achieved, and that it is also ensured that the vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media can be compressed to atmospheric pressure and pumped, even if partial condensation occurs. This is achieved by having the one or more first, vacuum-producing pumping-out stages (A1) followed by one or more second pumping-out stages (A2) that compress to atmospheric pressure so that the one or more first pumping-out stages or the space surrounding these is pumped out by the one or more second pumping-out stages to below a pressure corresponding to the dew point of the respective medium to be pumped out. IMAGE