Time dependent signal measurement for microelectronic components - using probe to detect sec. particles from specimen with measurement of pulse response

摘要

Time dependent signals are measured by detecting secondary particles released from a specimen by a pulsed particle probe. The probe is placed at a first measurement position at which a first time-dependent signal is measured using the sampling principle with a first pulse width and then with a second pulse width. The pulse resopnse or transfer function of the measurement system is determined from the signal measured with the larger pulse width and using the shorter pulse measurement for spreading. A second signal is measured at the same or a different position using the larger pulse width and by using the pulse response or transfer function for spreading.