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Pattern rotary angle - revealing systems

机译:花样旋转角度-显示系统

摘要

PURPOSE:To exactly detect an angle with regard to a circular pattern as well, by determining the center of gravity of a pattern to be detected, generating a search circle of a prescribed radius centering around said center of gravity, finding each circular are segment and detecting the angle. CONSTITUTION:A CPU 10 derives the center of gravity of an object pattern 1 by a primary moment from a moment extracting circuit 9 and an area from an area extracting circuit 8. Subsequently, a memory 12 is brought to an access so as to draw a circle of a prescribed radius centering around the center of gravity, and plural circular arc segments and its attribute, and a reference segment are extracted. Next, with regard to each attribute of the reference circular arc segment and both its adjacent circular arc segments, a coordination processing of an object sample and a standard sample is executed. After confirming that a corresponding relation of both of them is formed, a rotational angle is detected from an angle made with a prescribed axis of a rotational angle reference point which is defined by a relative position relation to the reference circular arc segment.
机译:目的:也要精确检测相对于圆形图案的角度,方法是确定要检测的图案的重心,生成一个以所述重心为中心的指定半径的搜索圆,找到每个圆形的段和检测角度。组成:CPU 10通过力矩提取电路9的一次力矩和面积提取电路8的面积来得出物体图案1的重心。随后,存储器12被访问以绘制图形。以重心为中心的规定半径的圆,提取多个圆弧线段及其属性以及基准线段。接下来,关于基准圆弧线段及其相邻的圆弧线段的每个属性,执行对象样本和标准样本的协调处理。在确认它们两者都形成了对应关系之后,从与旋转角度参考点的规定轴线形成的角度检测旋转角度,该角度由相对于基准圆弧段的相对位置关系定义。

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