Method of producing high T.sub.c superconducting NbN films

摘要

Thin films of niobium nitride with high superconducting temperature (T. sub.c) of 15.7° K. are deposited on substrates held at room temperature (˜90° C.) by heat sink throughout the sputtering process. Films deposited at P.sub.Ar 12.9.+-.0.2 mTorr exhibit higher T.sub.c with increasing P.sub.N2,I, with the highest T.sub. c achieved at P.sub.N2,I =3.7.+-.0.2 mTorr and total sputtering pressure P. sub.tot =16.6.+-.0.4. Further increase of N.sub.2 injection starts decreasing T.sub.c.