Magnetostatic wave tunable resonator

摘要

A magnetostatic wave tunable resonator which has fine stripe electrodes and bonding electrode films formed on the surface of a YIG thin film supported by a GGG substrate. The stripe electrodes, bonding electrode films and edges of the YIG film are formed by a chemical etching method based on photolithography. The resonator so formed has suppressed spurious resonance of high order modes and enables the use of a magnet of greatly reduced size.