Means for restoring the initial cleanness conditions in a quartz tube used as a reaction chamber for the production of integrated circuits

摘要

A vertical panel (1) separates the shop into an average cleanness zone (2) and a maximum cleanness zone (3). An elongated tank (4) is located in the zone (2) and an enclosure (6) is inserted in an opening (5) in the panel (1). The tubes are cleaned and prerinsed in the tank (4), then rinsed and dried in the enclosure (6), which also serves as a lock for the transfer of the tubes between the zones (2) and (3).