SIC MOISTURE SENSITIVE MATERIAL,SIC MOISTURE SENSITIVE SENSOR AND MANUFACTURE THEREOF

摘要

PURPOSE:To eliminate an ageing change for a long period and to reduce the deteriorations at the time of high temperature by containing specific amounts of alkaline metal, alkaline earth metal, transition metal in a thin SiC film. CONSTITUTION:Alkaline metal such as Li, Na, Ka or the like or its compound and/or alkaline earth metal such as Mg, Ca or the like or its compound are contained in a range of 0.01-3 mol% in an SiC thin film or an SiC thin film A which contains free Si having less than 50 % of the number of carbon atoms. One or more types of transition metal such as Fe, Ni, Cr, Mn, V, Ti or its compound are further contained in a range of 0.01-10 mol% of the film A. Thus, a long ageing change is eliminated to reduce deteriorations of the product at the time of high temperature.