首页>
外国专利>
PROCEDURE FOR REACTIVE ION CELL SCREENING BY INJECTING AN EASY AIR SPECIES
PROCEDURE FOR REACTIVE ION CELL SCREENING BY INJECTING AN EASY AIR SPECIES
展开▼
机译:注射简易的空气物种进行反应性离子细胞筛查的程序
展开▼
页面导航
摘要
著录项
相似文献
摘要
A process for reactive ion etching at a low self-biasing voltage, characterised in that the etching gas injected comprises 100% of inert gas and especially helium and/or neon.
展开▼